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Metrics REL-WLR Instrument Support
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The following table has been compiled to show the number of SMU units required to run the REL-WLR tests. This is very important for some of the instruments that can have 1 or more SMU units.
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Oxide Tests |
Stress Measure Tests |
| Keithley 4200 |
2 |
4 |
| Keithley 236** |
2 |
4 |
| Keithley 237** |
2 |
4 |
| Keithley 238** |
2 |
4 |
| Keithley 2400** |
2 |
4 |
| HP4145 |
2 |
4 |
| HP4142 |
2 |
4 |
| Agilent 4155 A/B/C |
2 |
4 |
| Agilent 4156 A/B/C |
2 |
4 |
| Agilent B1500A |
2 |
4 |
| Agilent 5260A |
2 |
4 |
| Agilent 5262A |
2 |
4 |
| Agilent 5263A |
2 |
4 |
| Agilent 5270A/B |
2 |
4 |
| Agilent 5272A |
2 |
4 |
| Agilent 5273A |
2 |
4 |
** These instruments use the Keithley 2361 driver. This driver is used to control a collection of Keithley 236, 237, 238, and 2400 instruments. The 2361 Trigger Control Unit is Not required.
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