Metrics IDE (Requires ICV)

Integrated Development Environment

Product Brochure

This add-on to ICV provides an integrated VBScript test development environment
including a comprehensive editor, debugger and execution engine. Several
libraries and functional APIs are included providing access to the ICV
communications server, instrument drivers, pulse generators, oscilloscope
drivers as well as thermal and prober driver templates. Math function libraries
are also included for performing parameter extraction and decision branching.
Use the IDE to modify the included WLR, NVM, and parametric algorithms or
develop your own.

In stock

SKU: IDE-4.3-NL Categories: Software, system_level Tags: algorithm, automation, BTS, CV, GPIB, HCI, HP, instruments, integrity, JRAMP, Keithley, Keysight, LAN, LXI, matrix, NBTI, oxide, prober, reliability, semiconductor, stress, switch, system, TDDB, test, VSILC, wafer

New Features
IDE Algorithm Suites
Instrument Support
System Requirements
Documentation

New Features

Features / Enhancements
• Updated Metrics IDE algorithm suites and performed some code refactoring and optimization.
• General clean-up of VBScript Algorithms including issues with parameter caching.
• Resized the wafer map display size in the “Wafer Map Editor” to support larger wafers with small die.
• General clean-up of the IDE algorithms and refinement of plotting routines for these algorithms; HCI, NBTI, NBTI-OTF.
• Optimized Charge Pumping and added correction for tunneling current to existing VBScript code.

Probe Driver Improvements
• Added VBScript drivers in Metrics IDE for Micromanipulator P300L with vision support.
• Corrected probe control chuck separation/contact state management to avoid marking wafers during probe plan verification.
• Updated NucleusVision.svbs driver to add additional error reporting and logging capability.

Other Improvements / Additions
• Added ‘directio.ini’ file to ‘C:\Metrics\instintdrvs’ directory in installation. NOTE: Adding this file and directory to installer file required creating a Service Pack release. Appying this update will overwrite all existing installation files so a full backup of modified files in the \algs directory is recommended before applying this update.

IDE Algorithm Suites

Capacitance vs. Voltage

Algorithm Name	Description	Notes
CVCalibration	Calibration functions for the 4980, 4284, 4285, and B1500
CVFrequencySweep	A sweep of the oscillator bias while measuring device parameters
CVBiasSweep	A sweep of the DC bias while measuring device parameters
CVBiasSweep_with_Hysteresis	A sweep of the DC bias while measuring device parameters with a return sweep to the starting bias
CVTimeSweep	Measurement of device parameters as a function of time
CVSinglePoint	A single point measurement of device parameters
CVMinimumPhaseAngle	A sweep of the Impedance and Phase Angle to extract Capacitance. The sweep occurs at several DC bias points
CV2FrequencyMeasurement	A measurement of Impedance and Phase Angle at two frequencies to extract Capacitance. The measurements occur at several DC bias points

Wafer Level Reliability - Oxides

Algorithm Name	Description	Notes
J_RAMP	A current ramp test that increases the applied current to the Gate while measuring the charge (Qacc) and voltage. The device is ramped at a constant time interval until breakdown or the maximum current is applied	stop criteria PercentChangeV outputs Vbd, Qbd, Fail mode
V_RAMP	A voltage ramp test the increases the applied voltage to the Gate while measuring the charge (Qacc) and current. The device is ramped at a specified rate until breakdown or the maximum voltage is applied	stop criteria Percent ChangeI outputs Vbd, Qbd, Fail mode
J_RAMPB	A current ramp test just like the J_RAMP test, except the device is ramped to a maximum current and then the current is held constant until breakdown or the maximum time is exceeded	stop criteria PercentChangeV outputs Vbd, Qbd, Fail mode calculates Slp (log slope I vs V)
V_TDDB	A constant voltage is applied to the device while the resulting current is monitored for breakdown. Breakdown can be defined as exceeding a threshold value or changing by a certain percentage	stop criteria PercentChangeI outputs Tbd, Qbd, Fail mode
I_TDDB	A constant current is applied to the device while the resulting voltage is monitored for breakdown. Breakdown can be defined as exceeding a threshold value or changing by a certain percentage	stop criteria PercentChangeV outputs Tbd, Qbd, Fail mode
V_SILC	A constant accelerated stress voltage is applied to the device while the resulting current is monitored for breakdown. At specified intervals, the voltage is lowered to a use voltage and the resulting current is measured. Breakdown can be defined as exceeding a threshold value or changing by a certain percentage	stop criteria PercentChangeI outputs Tbd, Qbd, Fail mode

Wafer Level Reliability - Stress Measure

Algorithm Name	Description	Notes
HCI	A combined algorithm that performs all functions of a traditional HCI test. This algorithm allows for the specification of both the Vt and Single Point Tests as well as the stress conditions and times. The device is subjected to the stress-measure cycle until a device parameter exceeds specified conditions or the maximum stress time has occurred	stop criteria IdMax, %DegVt, %DegGM
VtMOS	This test sweeps the Gate voltage while applying a constant Drain voltage and measuring the Drain current. This test can be combined with the Stress algorithms to create a test	calculates Vt from Id (linear), Id_sat (saturation)
Ispot	This algorithm applies a bias to the Gate, Drain, and Substrate of the device while grounding the source. The resulting current values are measured	outputs Ids, Igs, Isub
Gummel	The Base-Emitter voltage is swept while the Collector voltage is held constant. The resulting Base and Collector currents are measured and the Gain is calculated	outputs Bf, Bf_max, Vbe_on
RGummel	The Base-Collector voltage is swept while the Emitter voltage is held constant. The resulting Base and Emitter currents are measured and the Gain is calculated	outputs Br, Br_max, Vbc_on
DCStress	A constant accelerated stress voltage is applied to the device. The substrate current can be monitored to stop the device stress	stop criteria max time exceeded or % change of any monitored current supports 4-ch monitoring
ACStress	A constant accelerated stress voltage is applied to the device. The AC signal is applied using a pulse generator. The substrate current can be monitored to stop the device stress	stop criteria max time exceeded or % change of any monitored current supports 4-ch monitoring
CP_CA	A constant amplitude AC signal is placed upon the gate of the device while the substrate current is measured. The voltage offset is changed to move the carriers toward the oxide junction	outputs Nit, Nit_corr, Isd, Itun, Icp_max, Nit_max
CP_VA	A variable amplitude AC signal is placed upon the gate of the device while the substrate current is meas	outputs Icp, Icp_corr, Isd, Itun, Icp_max
CP_VF	A variable frequency AC signal is placed upon the gate of the device while the substrate current is measured	outputs Icp, Icp_corr, Isd, Itun, Icp_max, Qss, Dit
NBTI	A combined algorithm that performs all functions of a traditional NBTI test. This algorithm allows for the specification of the Vt test as well as the stress conditions and times. The device is subjected to the stress-measure cycle until a device parameter exceeds specified conditions or the maximum stress time has occurred	stop criteria Vt_stop, %DegVt outputs Id0, Id1..n, Vt, %DegVt
NBTI-OTF	A combined algorithm that performs all functions of a traditional NBTI On-the-Fly test. The test alternates stress and measurement cycles. The method of the device sweep and stress is designed to minimize the amount of time the device is not being stressed. The test allows the user to select several different parameters to monitor and use for the stopping of a test	stop criteria Id_stop, %DegId outputs Id, %DegId, Fail mode

Non Volatile Memory - Capacitor(s) Reliability

Algorithm Name	Description	Notes
NVMCycleCap	Applies pulse cycles to an NVM capacitor
NVMPulseCap	Applies pulses to an NVM capacitor
NVMRampCycleCap	Applies ramped pulse cycles to an NVM capacitor
NVMRampPulseCap	Applies ramp pulses to an NVM capacitor
NVMCycle2Cap*	Applies pulse cycles to two (2) NVM capacitors simultaneously	* requires dual channel PGU
NVMPulse2Cap*	Applies pulses to two (2) NVM capacitors simultaneously
NVMRampCycle2Cap*	Applies ramped pulse cycles to two (2) NVM capacitors simultaneously
NVMRampPulse2Cap*	Applies ramp pulses to two (2) NVM capacitors simultaneously.

Non Volatile Memory - Device Reliability

Algorithm Name	Description	Notes
NVMCycleDev*	Applies pulse cycles to an NVM device gate terminal	* requires supported SMU to bias for other device terminals
NVMPulseDev*	Applies pulses to a NVM device gate terminal
NVMRampCycleDev*	Applies ramped pulse cycles to a NVM device gate terminal
NVMRampPulseDev*	Applies ramp pulses to a NVM device gate terminal

Instrument Support

Semiconductor Parameter Analyzers and DC Sources

Vendor	Model	Description	Notes
HP (Agilent)	4142B	Modular DC Source/Monitor
HP	4145A/B	Semiconductor Parameter Analyzer
HP (Agilent)	4155A/B/C	Semiconductor Parameter Analyzer
HP (Agilent)	4156A/B/C	Semiconductor Parameter Analyzer
Agilent	E5270B	8-slot Precision Measurement Mainframe
	- E5280B	High Power Source/Monitor Unit (HPSMU)
	- E5281B	Medium Power Source/Monitor Units (MPSMU)
	- E5286A	High Resolution Source/Monitor Unit (HRSMU)
	- E5287A	Atto Level High Resolution Source/Monitor Unit
	- E5288A	Atto Sense and Switch Unit
Agilent	5272A	2-slot High Speed Source Monitor Unit
Agilent	5273A	2-slot High Speed Source Monitor Unit
Agilent	E5260A	8-slot High Speed Measurement Mainframe
	- E5290A	High Power Source/Monitor Unit (HPSMU)
	- E5291A	Medium Power Source/Monitor Units (MPSMU)
Agilent	5262A	2-slot High Speed Source Monitor Unit
Agilent	5263A	2-slot High Speed Source Monitor Unit
Keysight	B1500A	Semiconductor Device Analyzer
	- B1510A	High Power Source/Monitor Unit (HPSMU)
	- B1511A	Medium Power Source/Monitor Units (MPSMU)
	- B1514A	50us Pulse Medium Current Source/Measure Unit (MCSMU)
	- B1517A	High Resolution Source/Monitor Unit (HRSMU)
	- B1520A	Multi-frequency Capacitance Measurement Unit
Keysight	B1505A	Power Device Analyzer/Curve Tracer
	- B1512A	High Current Source/Monitor (HCSMU, DHCSMU)
	- B1513A	High Voltage Source/Monitor (HVSMU)
	- B1514A	50us Pulse Medium Current Source/Measure Unit (MCSMU)
	- N1258A	Module selector
Keysight	B2900A	Precision Source/Measure Unit
	- B2901A	100 fA Single Channel Precision Source/Measure Unit
	- B2902A	100 fA Dual Channel Precision Source/Measure Unit
	- B2911A	10 fA Single Channel Precision Source/Measure Unit
	- B2912A	10 fA Dual Channel Precision Source/Measure Unit
Keithley	Model 236*	Source Measure Unit	*When using more than one of these instruments together, you will need the 2361 TCU and all connectors
Keithley	Model 237*	High Current Source Measure Unit
Keithley	Model 238*	High Current Source Measure Unit
Keithley	2400 Series*	Digital Source Meter
	- 2410*	Digital High Voltage Source Meter
	- 2420*	Digital High Current Source Meter
	- 2430*	Digital High Power Source Meter
Keithley	2600A Series	Digital Source Meter
	- 2601A	20W Single Channel Source Meter
	- 2602A	20W Dual Channel Source Meter
	- 2611A	200V Single Channel Source Meter
	- 2612A	200V Dual Channel Source Meter
	- 2635A	1 fA 20W Single Channel Source Meter
	- 2636A	1 fA 20W Dual Channel Source Meter
Keithley	Model 90	I-V Semiconductor Test System
Keithley	4200-SCS	Semiconductor Characterization System
QualiTau	DSPT9012	Desktop Semiconductor Parametric Tester

Capacitance and LCRZ Meters

Vendor	Model	Description	Notes
HP (Agilent)	4284A*	Precision LCR Meter	20 Hz-1 MHz (* supported in CV Algorithm Suite)
HP (Agilent)	4285A*	Precision LCR Meter	75 Hz-30 MHz
HP (Agilent)	4294A*	Impedance Analyzer	40 Hz-110 MHz
Keysight (Agilent)	E4980A*	Precision LCR Meter	20 Hz-2 MHz
Keysight (Agilent)	B1520A*	Multi-frequency Capacitance Measurement Unit	1 kHz - 5 MHz

Switch Matrix and Multiplexers

Vendor	Model	Description	Notes
HP	4084A/4085A	Switch Matrix Controller and Matrix	48-Pin
Keysight (Agilent)	E5250A	Low-Leakage Switch Mainframe
	- E5252A	Low-Current Switch Matrix Card	10 input x 12 output
	- E5255A	Multiplexer Card	2 input x 24 output
Keysight (Agilent)	B2200A	14ch Low-Leakage Switch Mainframe
	- B2210A	fA Low-Leakage Switch Module	14 input x 12 output
Keysight (Agilent)	B2201A	14ch Low-Leakage Switch Mainframe
	- B2211A	Low-Leakage Switch Module	14 input x 12 output
Keithley	Model 706	Scanner Mainframe
Keithley	Model 707	Switch Matrix Mainframe
	- Model 7071	General Purpose Matrix Card	8 input x 12 output
	- Model 7072	Semiconductor Matrix Card	4 input x 12 output
	- Model 7072-HV	High Voltage Semiconductor Matrix Card	8 input x 12 output
	- Model 7073	Coaxial Matrix Card
	- Model 7074	General Purpose Mux Card	(8) 1 input x 12 output
	- Model 7075	2-Pole General Purpose Mux Card	(8) 1 input x 12 output
	- Model 7076	Dual 2-Pole Mux Card	(2) 4 input x 12 output
	- Model 7077	Isolated Coaxial Matrix Card	8 input x 12 output
Keithley	Model 707A	Switch Matrix Mainframe
	- Model 7172	Low Current Matrix Card	8 input x 12 output
	- Model 7174	Low Current High-Speed Matrix Card	8 input x 12 output
Keithley	Model 707B*	Switch Matrix Mainframe	* No SCPI support - must set to IDDC compatibility mode
Keithley	Model 708	Single Slot Switch Mainframe
Keithley	Model 7001	Switch Control Mainframe
Keithley	Model 7002	Switch Control Mainframe
MRD	4x28 Mux	Switch Matrix/Mux Module	4 input x 28 output

Semi-Auto and Full-Auto Probers

All stations are controlled via GPIB. Metrics software should not reside on the probe PC due to resource conflicts.

Vendor	Model	Description	Notes
Cascade	Summit 10000	Semi-automatic Probe Station	requires Nucleus v.4.x or Velox 2.0 Software
Cascade	Summit 12000	Semi-automatic Probe Station	requires Nucleus v.4.x or Velox 2.0 Software
Cascade	S300	Semi-automatic Probe Station	requires Nucleus v.4.x or Velox 2.0 Software
Cascade	Elite-300	Semi-automatic Probe Station	requires Nucleus v.4.x or Velox 2.0 Software
Cascade	PS-21	Automatic Probe Station
Alessi (Cascade)	Galaxy	Semi-automatic Probe Station	requires version 5.20H
Suss Microtech (Cascade)	PA200	Semi-automatic Probe Station	requires Prober Bench Software v.7.x
Suss Microtech (Cascade)	PA300	Semi-automatic Probe Station	requires Prober Bench Software v.7.x
Suss Microtech (Cascade)	PS200	Semi-automatic Probe Station	requires Prober Bench Software v.7.x
Suss Microtech (Cascade)	PS300	Semi-automatic Probe Station	requires Prober Bench Software v.7.x
Micromanipulator	8860	Semi-automatic Probe Station	requires pcProbe 2.6 and pcBridge Software
Micromanipulator	4460	Semi-automatic Probe Station	requires NetProbe Software
Micromanipulator	9920	Semi-automatic Probe Station	requires NetProbe Software
Vector Semiconductor	VX-3000SV	Semi-automatic Probe Station
VX-3000SV Semi-automatic Probe Station	AX-2000	Semi-automatic Probe Station
Lucas Signatone		Semi-automatic Probe Station	requires Interlink Controller and GPIB control installed
TEL	P-8XL	Automatic Probe Station
TEL	P-12XL	Automatic Probe Station
TEL	19S	Automatic Probe Station
TSK	A-PM-90	Automatic Probe Station
Accretech	UF300	Automatic Probe Station
Accretech	UF2000	Automatic Probe Station
Accretech	UF3000	Automatic Probe Station
Electroglas	1034	Automatic Probe Station	with Option D, GPIB Control
Electroglas	2001 Series	Automatic Probe Station	requires GPIB Control
Electroglas	3001 Series	Automatic Probe Station	requires GPIB Control
Electroglas	4085	Automatic Probe Station
Electroglas	4090	Automatic Probe Station

Pulse Generator Units

Vendor	Model	Description	Notes
HP (Agilent)	8110A	Pulse Generator	150 MHz, +- 20V, 50 Ohm
HP (Agilent)	81110A	Pulse Pattern Generator	165 MHz, +- 10V, 50 Ohm 330 MHz, +- 3.8V, 50 Ohm
HP (Agilent)	41501A/B*	Pulse Generator Units	* for use with HP4155 or HP4156 Semiconductor Parameter Analyzer (supports 16440A SMU/PGU selector)

Thermal Controllers

Vendor	Model	Description	Notes
Cascade	All	Thermal Chuck	requires Nucleus 4.x or Velox 2.0 Software
Suss Microtech (Cascade)	All	Thermal Chuck	requires Nucleus 4.x or Velox 2.0 Software
Micromanipulator	8860	Thermal Chuck	requires pcTC Software

Custom Instruments

Vendor	Model	Description	Notes
4 Dimensions	CV90M	Mercury Probe System	RS-232 Control

System Requirements

* See System Requirements for ICV software product. ICV is required to use the Integrated Developer Environment (IDE).

Documentation

Integrated Development Environment (IDE)

IDE 4.3 Digital Download Guide