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 Metrics I/CV FAQ's

Probe Station Control

List of Questions

1. I want to use the navigation software that is provided with the probe station. I followed the directions to configure the system, but I get an error when I try to start the Metrics Probe software. Why?
Answer

2. How do I quickly setup a test to run a single test on a wafer?
Answer

3. How do I add sub-die stepping to my test?
Answer

4. I have very small die sizes and the wafer plan is difficult to read. How can I fix this?
Answer

5. I have a large number of sub-die locations and I don't want to enter them every time I create a wafer plan. Can you help me?
Answer

Answers to Questions

1. I want to use the navigation software that is provided with the probe station. I followed the directions to configure the system, but I get an error when I try to start the Metrics Probe software. Why?

The reason is that by using the probe vendor's navigation software, you are chosing to not use Metrics Probe. This is not a problem. However you must remember that the creation and verification of the wafer plan will have to be performed using the probe station manufacturer's software. Metrics I/CV can communicate with the software, but the button on the Metrics System Tools Toolbar is only designed to start Metrics Probe (not the probe vendor's software). Thus if you are using the probe vendor's software, DO NOT click the Metrics Probe button.

2. How do I quickly setup a test to run a single test on a wafer?

Follow these steps:

  1. Create the measurement using ICS.
  2. Create the switch setting (if necessary).
  3. Open the Module Editor of I/CV.
  4. Select Add Line and select the "Connect Switch" object. Follow the instructions to select the setting.
  5. Highlight the second line of the script "END" and click Insert Line.
  6. Select the Run ICS Test object.
  7. Follow the directions to select the ICS test.
  8. Click the OK button to exit and save the Module Script.
  9. Click the Exit button of the I/cV System Tools Toolbar.
  10. Start the I/CV Test Tools.
  11. Click the Auto Test button.
  12. Follow the directions to run the test.

3. How do I add sub-die stepping to my test?

Sub-die stepping is handled by the Die Editor. The Die Editor coordinates the sub-die stepping with the execution of a Module Script. Open the Module editor and add the appropriate sub-die movement. Then insert the Module Script execution between the BEG and END of the move. When you start the Auto Test select the Die Script instead of the Module Script and the Die plan will be run at each die of the wafer plan.

4. I have very small die sizes and the wafer plan is difficult to read. How can I fix this?

Use the Metrics Probe driver and then Create a Probe List. The Probe List is a text file of all of the locations that you wish to probe. The positions are all referenced to a single point on the wafer, so the list contains the name, x offset, and y offset of the device. The list can be created in any text editor or in Excel. If using a spreadsheet make sure to save the file as a Comma-Seperated Vaules file (.CSV) then change the extension to .plist so I/CV can recognize it. A sample probe list is installed in the Metrics directory.

5. I have a large number of sub-die locations and I don't want to enter them every time I create a wafer plan. Can you help me?

Metrics Probe contains a utility named the Module List Editor. This allows you to create a list of all of the Modules (sub-die) on the wafer. Then just select the sub-die locations to visit while creating the test in the Die Editor.